Statistical Consideration in EDS Microanalysis
Abstract
Abstract The overall precision of electron microprobe measurements has not been studied extensively. It is often only described in terms of the precision of individual x-ray measurements or worse yet by relying on some rule of thumb based on historical experience. This is unfortunate because the analyst is expected to determine whether his or her measurements can distinguish between two samples or if a particular component can be detected above background or in the presence of other elements. Thus precision is at the heart of establishing composition/structure/property relationships and clearly deserves more attention. There are many sources of variability encountered in determining composition whether using energy dispersive (EDS) or wavelength dispersive (WDS) spectrometery. These include Instrumental Variables, i.e., beam voltage and current, specimen position and orientation, detector position, and measurement electronics; Specimen Preparation, i.e., how representative the sample is of the problem to be solved, specimen preparation and contamination, and quality of standards; Data Processing, i.e.,
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