An Analysis of the Factors Affecting the Accuracy of EDS
Abstract
The combined use of SEM and EDS can be instrumental in carrying out non-destructive elemental qualitative analysis,semi-quantitative analysis and even quantitative analysis on a variety of materials con-veniently and harmlessly.However,it may affect the accuracy of EDS in the application.This paper discusses the factors involved in the process including the sample preparation,the choice of accelerating voltage as well as the identification of overlapping peaks.
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