Recent developments in EDS for TEM/STEM
Abstract
The development of TEM and STEM in the 100 keV to 400 keV range has prompted the increased use of energy dispersive spectrometers (EDS) for analytical studies on these instruments. The TEM/STEM environment is a harsh one for the EDS in comparison to the SEM. In response to this special environment, spectrometers specifically for TEM/STEM have been developed. This paper will provide a general review of these developments and indicate future directions. Space near the specimen holder is at a premium in most TEMs. This reduces the solid angle subtended by the Si(Li) detector. Increased cooperation between EM and EDS manufacturers, and the use of new materials for shielding, collimation, and internal detector parts have improved this situation. The use of graded material collimators, removable ultra thin windows (UTW), and compact gate valve arrangements can reduce detector size. The routine use of computer aided design (CAD) systems and computer controlled machining allow extremely close tolerances to be incorporated in the latest designs.
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