New approaches in angle resolved X-ray analysis of stratified materials in the laboratory
Abstract
Providing access to angular resolved X-ray fluorescence methods in laboratories can enhance the dissemination of these methods for the depth-resolved elemental analysis of samples with layers in the nanometer range. The measurements are so far mainly performed at synchrotron radiation facilities and thus the number of users is limited. Especially in the hard X-ray range, where the production of X-rays in the laboratory is straight forward with X-ray tubes, such laboratory spectrometers can be highly beneficial for industrial and laboratory applications. A grazing emission X-ray fluorescence spectrometer has been developed and characterized. A scan-free approach is chosen which necessitates the use of an area detector and reliable routines for calibration and evaluation of data. Both are presented, and an error discussion of the former is included. The setup is validated with well-known samples and its limits tested with chromium-scandium-boron-carbide multilayer samples with strong intermixing between the subnanometer thick layers. It is shown that high statistical uncertainties are present in the measured profiles due to the measurement statistics. To ensure a quantification of the samples additional grazing incidence X-ray fluorescence measurements are performed with a commercial Bruker Nano GmbH spectrometer. However, the development of the setup was not finished by the time of the measurements thus a calibration of the angular axis, a beam characterization and a…
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