Proceedings of SCANNING 94/SEEMS 94 Charleston, South Carolina, USA
Abstract
Monte Carlo techniques have long been employed to simulate the nature of electron scattering in solid materials.These simulations, in turn, have been used to predict parameters for electron microscopy and x-ray microanalysis such as electron and x-ray ranges and backscattered electron yields.Monte Carlo techniques have also been used to predict analytical behavior in unconventional specimens, such as thin films and particles (e.g., relative intensity as a function of particle size).However, because of limitations in the physical models and lengthy calculations involved, Monte Carlo techniques have only very rarely been applied to actually correct quantitative analysis data.We have explored the practicality of developing a Monte Carlo technique-based correction procedure for microbeam analysis and the current state of accuracy of Monte Carlobased corrections versus "conventional" corrections.By using a simple but accurate numerical approximation for the relative elastic scattering cross section as a function of Z and E, it is possible to develop Monte Carlo procedures to calculate trajectories in multiple-element samples with the same speed as for single element standards.Modern expressions for the ionization cross section and the electron energy loss (particularly at low energies) have significantly improved the agreement between Monte Carlo calculations and experimentally-measured data.Monte Carlo algorithms that produce the same level of accuracy in correcting conventional…
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