Silicon and polyimide filters for radiation with quantum energies 0. 1-1. 5 keV
Abstract
The authors prepared membranes of Si and polyimide (C/sub 22/O/sub 5/N/sub 2/H/sub 10/)n with thickness less than 1 submicron with areas not less than 3 x 3 mm. Such membranes can be used either directly as filters which are placed in front of the radiation detector or as substrates for the deposition on them of materials with the needed properties. The authors used laser-induced sources to conduct the filter experiments. Silicon has substantial absorption in the energy region 0.1-0.5 keV; therefore, the authors also studied the possibility of forming a patterned window in the membrane in the polymer layer on the substrate after its development. The polyimide filter in this case lies in front of the Si filter. The use of polyimide allows extraction of the needed region of the spectral distribution of the radiation. During preparation of Si membranes as the base and body for the membrane, the authors chose substrates of Si with orientation along the normal to the substrate. The choice of this orientation was due to the subsequent use of etch processes. The Si substrates were doped from both sides with boron to a concentration of 5 x 10/sup 19/cm/sup -3/ by diffusion into the wafer.
Read the paper
Related studies
- Chaos and quantum thermalization
- The Dalton quantum chemistry program system
- Cord Blood Leptin and Adiponectin as Predictors of Adiposity in Children at 3 Years of Age: A Prospective Cohort Study
- Quantitative metabolomics by H-NMR and LC-MS/MS confirms altered metabolic pathways in diabetes
- Stable adiabatic quantum batteries
- A novel self-lipid antigen targets human T cells against CD1c(+) leukemias
Go deeper in Evidence Hub
Evidence Hub adds a study data sheet (design, sample size, evidence level, key numbers), an AI summary and a chat grounded in the paper's text.