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High-resolution X-ray photoelectron spectroscopy and characteristic electron-energy loss spectroscopy of the electronic structure of phosphorus-implanted silicon and quantum dots of silicon dioxide with silicon impurities

O. K. Kuvandikov, Eshkuvat U. Arzikulov, А. И. Ковалев, David I. Tetelbaum

Journal of Communications Technology and Electronics, 2007

Abstract

The effect of phosphorus impurities on the electronic structure of silicon single crystals and SiO 2 : Si nanocomposites is studied. The SiO 2 : Si structures with phosphorus impurities that are annealed over 2 h at a temperature of 1000°C exhibit an increase in the photoluminescence peak related to Si nanocrystals. The experimentally determined densities of states in the valence and conduction bands of SiO 2 : Si composites are in good agreement with the local electronic structure in the vicinity of silicon impurities that is calculated within the approximation of linear muffin-tin orbitals.

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