Recent Progress of Structural Design, Fabrication Processes, and Applications of Flexible Acceleration Sensors
Abstract
Flexible acceleration sensors demonstrate revolutionary potential in healthcare, structural vibration monitoring, and consumer electronics owing to their unique conformal adhesion capability and mechanical adaptability. However, current academic research presents two distinct paradigms for realizing flexibility: one is the hybridly flexible sensor, which incorporates traditional micro-electro-mechanical System (MEMS) acceleration sensor chips with flexible packaging/substrates; the other is the intrinsically flexible sensor, whose sensing unit and substrate are entirely composed of flexible materials enabled by microstructural design. This review first analyzes the fundamental differences and design challenges between these two flexible architectures. It then systematically elucidates five core sensing mechanisms-capacitive, piezoresistive, triboelectric, piezoelectric, and electromagnetic-comparing their working principles, material systems, structural designs, and performance metrics. Among these, piezoelectric and triboelectric types exhibit distinctive advantages in self-powering capability, whereas resistive and capacitive approaches offer greater ease of integration. Furthermore, the applications of intrinsically flexible acceleration sensors in structural health monitoring, wearable devices, automotive safety, and other fields are discussed, with particular emphasis on their unique strengths in real-time vibration monitoring. Finally, the review summarizes existing…
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