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Effect of anodization conditions on the synthesis of TiO2 nanopores

Subhasish Chatterjee, Miriam Ginzberg, Bonnie Gersten

Mater. Res. Soc. Symp. Proc. Vol. 951, 0951-E09-27 (2006), 2012

Abstract

Nanoporous structures play a promising role in the development of nanomechanical, nanoelectrical and biosensing devices. In addition, nanopores can be utilized as chemical and gas sensors. TiO2 is a semiconductor material, which can have a wide range of applications in nanopore-based sensors. In this study, TiO2 nanopores were prepared by electrochemical anodization. Titanium was used as the anode, while platinum was used as the cathode in an electrochemical cell filled with a hydrofluoric acid electrolyte solution. During the preparation process, titanium was converted to its oxide form. Nanostructures were synthesized under varying physical conditions, including HF concentrations of 0.5-10% and anodization times of 5-30 minutes. The resulting nanopore structures were characterized by scanning electron microscopy (SEM). With a progressive increase in HF concentration (from 0.5% to 10%), the diameter of the nanopores decreased, from approximately 100 nm in diameter to 50 nm. The nanopores showed a transformation from tube-like structures to pore networks with increased HF concentration or anodization time. The results show that the dimensions and morphology of the nanopores can be controlled by alteration of the anodization conditions.

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