Optimization Techniques for Miniaturized Integrated Electrochemical Sensors
Abstract
Electrochemical sensors are integral components of various integrated sensing applications. In this work, we provide details of optimizing electrochemical sensors for CMOS compatible integrated designs at sub-mm size scales. The focus is on optimization of electrode materials and geometry. We provide design details for both working electrode and reference electrode materials for hydrogen peroxide sensing applications which form the basis for many metabolic sensors. We also present results on geometrical variations in designing such sensors and demonstrate that such considerations are very relevant for optimizing the overall sensor performance. We also present results for such optimized sensors on actual CMOS platforms. The methods presented in this work can be adopted for countless applications of electrochemical sensing platforms.
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