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Progress in the Fabrication and Optimization of High-Energy Diamond X-Ray Refractive Lenses

Huang H, Du K, He W, Zhang W, Yang X, Ming W

Micromachines, 2026

Abstract

The extreme thermal loads encountered in fourth-generation synchrotron radiation sources and X-ray free-electron lasers (XFEL) impose stringent requirements on X-ray optical components. Conventional materials such as beryllium and silicon increasingly exhibit limitations under high-energy conditions, including insufficient thermal conductivity, limited radiation stability, and significant absorption losses, rendering them inadequate for next-generation high-energy X-ray optics. In this context, single-crystal diamond, with its high thermal conductivity, low absorption coefficient, and excellent mechanical strength and radiation resistance, has emerged as a promising candidate for high-energy X-ray refractive optics. This review systematically summarizes recent advances in the fabrication and performance optimization of diamond X-ray refractive lenses for high-energy applications. Starting from the evolving demands of modern synchrotron radiation facilities and XFEL, the fundamental requirements for materials and structural design in high-energy X-ray optics are analyzed. Through comparisons with representative materials, the advantages of diamond in thermal management and transmission performance are highlighted. Major micro- and nanofabrication techniques, including femtosecond laser processing, focused ion beam milling, and plasma etching, are comprehensively reviewed, with emphasis on their respective characteristics in terms of processing efficiency, precision control,…

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